MQ2-Gassensorbereich

WO2017148715A1 - Micromechanical sensor device …

The invention relates to a micromechanical sensor device and to a corresponding production method. The micromechanical sensor device is equipped with a sensor substrate (MC), having a front side (VS) and a back side (RS) and a back side cavity (K); wherein a substantially closed membrane region (M) is formed on the front side (VS), which membrane region is arranged above the back side cavity ...

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WO2019007772A1 - Micromechanical sensor device …

The invention relates to a micromechanical sensor device and to a corresponding production method. The micromechanical sensor device is equipped with a sensor substrate (2) having a front face (VS) and a rear face (RS), a sensor area (1) provided on the front face (VS), which may be brought into contact with an ambient medium, and a capping device (4) mounted on the front side (VS) for capping ...

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DE102017211451A1 - Micromechanical sensor …

The invention provides a micromechanical sensor device and a corresponding manufacturing method. The micromechanical sensor device is equipped with a sensor substrate (2) having a front side (VS) and a rear side (RS), a sensor region (1) provided on the front side (VS), which can be brought into contact with an environmental medium, and one on the Front side (VS) applied Verkappungseinrichtung ...

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DE102017211451B4 - Micromechanical sensor device …

The invention provides a micromechanical sensor device and a corresponding manufacturing method. The micromechanical sensor device is equipped with a sensor substrate (2) having a front side (VS) and a rear side (RS), a sensor region (1) provided on the front side (VS), which can be brought into contact with an environmental medium, and one on the Front side (VS) applied Verkappungseinrichtung ...

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WO2019007772A1 - Micromechanical sensor device …

The invention relates to a micromechanical sensor device and to a corresponding production method. The micromechanical sensor device is equipped with a sensor substrate (2) having a front face (VS) and a rear face (RS), a sensor area (1) provided on the front face (VS), which may be brought into contact with an ambient medium, and a capping device (4) mounted on the front side (VS) for capping ...

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