The rise in portable and wearable electronics is driving the need to reduce both the energy consumption and footprint of all types of electronic components, including oscillators. Oscillators based on Micro-Electro-Mechanical Systems (MEMS) technology combine accurate frequency generation with low power consumption and are becoming increasingly popular in clock circuits.
MEMS technology utilizes to a large extent fabrication processes originally developed for semiconductor chips, such as micro-lithography, selective etching and patterning, deposition of conductive and insulating layers, impurity implantations and annealing, thermal diffusion and oxidation processes.
2020-7-21 · MEMS Inertial and Pressure Sensors Microelectromechanical system (MEMS) sensors, including accelerometers, gyroscopes, pressure sensors, and microphones, have become a multi-billion dollar market in consumer electronics, automobile, and industrial applications.
This paper reports the design, fabrication, and performance of piezoelectric bidirectional conveyors based on microelectromechanical systems (MEMS) and featuring 3D-printed legs in bridge resonators. The structures consisted of aluminum-nitride (AlN) piezoelectric film on top of millimeter-sized rectangular thin silicon bridges and two electrode patches.
2003-10-16 · III. MEMS Device Modeling and Design. Gregory T.A. Kovacs, PI Chris Storment, Project Leader. Objectives: Design and implementation of MEMS structures, including materials parameter extraction, will be used to test the CAD and physical models based on MEMS devices of interest to DARPA. The experimental measurements made with these structures ...